A numerical method aimed to predict the optomechanical dynamics in micro- and nano-structured resonant cavities is introduced here. The rigorousness of it is ensured by exploiting the harmonic version of the transformation optics (TO) technique and by considering all the energy-transduction contributions of electrostriction, radiation pressure, photoelasticity and moving boundaries. Since our full-wave approach implements a multi-modal analysis and also considers material losses, from both a mechanical and an optical point of view, a considerable step further has been made in respect to the standard optomechanical perturbative theory. The efficiency and the versatility of the strategy are tested by analysing the optomechanical behaviour of a corrugated Si-based nanobeam and comparing numerical results to experimental ones from the literature.

本文介绍了一种旨在预测微结构和纳米结构谐振腔中光机械动力学的数值方法。通过使用变换光学（TO）技术的谐波版本并考虑电致伸缩，辐射压力，光弹性和移动边界的所有能量转换贡献，可以确保其严格性。由于我们的全波方法既可以进行多模态分析，也可以从机械和光学的角度考虑材料损失，因此，相对于标准的光机械微扰理论，迈出了重要的一步。通过分析波纹硅基纳米束的光机械性能，并将数值结果与文献中的实验结果进行比较，测试了该策略的效率和多功能性。