We demonstrate fabrication of a high-quality factor lithium niobate double-disk whispering-gallery microcavity using femtosecond laser assisted ion beam milling. Using this method, two vertically stacked 30-µm diameter disks with a 200-nm gap are fabricated. With our device, an optical quality factor as high as 1.35 × 10⁵ is demonstrated. Our approach is scalable to fabricate multiple disks on a single chip.

中文翻译：

---

用飞秒激光制造高质量因子铌酸锂双盘

我们演示了使用飞秒激光辅助离子束铣削制造高质量因子铌酸锂双盘耳语画廊微腔的制造。使用这种方法，制造了两个垂直堆叠的，直径为30μm的，间隙为200nm的磁盘。使用我们的设备，其光学品质因数高达1.35×10 ⁵。我们的方法可扩展以在单个芯片上制造多个磁盘。