In modern high resolution optical systems like astronomical telescopes or lithographic objectives, performance degradations can be caused by various disturbances. Holistic optical system simulation is required to predict the performance or the high precision systems. In this paper a method for transient dynamical-thermal-optical system modeling and simulation is introduced. Thereby, elastic deformation, rigid body motion, and mechanical stresses due to dynamical excitation are calculated using elastic multibody system simulation and temperature changes are determined using thermal finite element analysis. The deformation, the motion, and the mechanically and thermally induced stress index changes are then considered in a gradient-index ray tracing. Finally, the presented method is applied in a dynamical-thermal single lens system.

中文翻译：

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瞬态动态热光学系统的建模与仿真

在现代高分辨率光学系统（如天文望远镜或光刻物镜）中，各种干扰都会导致性能下降。需要整体光学系统仿真来预测性能或高精度系统。本文介绍了一种瞬态动态热光学系统的建模与仿真方法。因此，使用弹性多体系统仿真计算了由于动态激励而引起的弹性变形，刚体运动和机械应力，并使用热有限元分析确定了温度变化。然后在梯度指数射线跟踪中考虑变形，运动以及机械和热应力指数的变化。最后，将所提出的方法应用于动态热单透镜系统。