Inorganic metal halide perovskites are relevant semiconductors for optoelectronic devices. The successful deposition of thin films of CsPbBr3 and CsPbCl3 has recently been obtained by Radio-Frequency magnetron sputtering. In this work we compare the morphological, structural and optical characteristics of the two materials obtained with this deposition technique. A detailed photoluminescence (PL) spectroscopy study of the as-grown samples was conducted at the macro and micro scale in a wide temperature range (10-300 K) to fully characterize the PL on sample areas of square centimeters, to assess the origin of the inhomogeneous broadening and to quantify the PL quantum yield quenching. Our results prove that this technique allows for the realization of high quality nanometric films with controlled thickness of relevance for optoelectronic applications.

中文翻译：

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铯铅卤化物钙钛矿沉积的新途径

无机金属卤化物钙钛矿是光电器件的相关半导体。最近通过射频磁控溅射成功地沉积了 CsPbBr3 和 CsPbCl3 薄膜。在这项工作中，我们比较了用这种沉积技术获得的两种材料的形态、结构和光学特性。在宽温度范围 (10-300 K) 的宏观和微观尺度上对生长样品进行了详细的光致发光 (PL) 光谱研究，以充分表征平方厘米样品区域上的 PL，以评估不均匀展宽并量化 PL 量子产率猝灭。