Growing demands for comprehending complicated nano-scale phenomena in atomic resolution has attracted in-situ transmission electron microscopy (TEM) techniques for understanding their dynamics. However, simple to safe TEM sample preparation for in-situ observation has been limited. Here, we suggested the optical microscopy based micro-manipulating system for transferring TEM samples. By adopting our manipulator system, several types of samples from nano-wires to plate-like thin samples were transferred on micro-electro mechanical systems (MEMS) chip in a single step. Furthermore, the control of electrostatic force between the sample and the probe tip is found to be a key role in transferring process.

中文翻译：

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使用微机械手进行原位 MEMS 实验的 TEM 样品制备

对以原子分辨率理解复杂纳米级现象的需求不断增长，吸引了原位透射电子显微镜 (TEM) 技术来了解其动力学。然而，用于原位观察的简单到安全的 TEM 样品制备受到限制。在这里，我们建议使用基于光学显微镜的微操作系统来传输 TEM 样品。通过采用我们的机械手系统，从纳米线到板状薄样品的几种类型的样品可以一步转移到微机电系统 (MEMS) 芯片上。此外，发现样品和探针尖端之间静电力的控制是转移过程中的关键作用。