Abstract. Background: Charging of insulators is a complex phenomenon to simulate since the accuracy of the simulations is very sensitive to the interaction of electrons with matter and electric fields. Aim: In this study, we report model improvements for a previously developed Monte-Carlo simulator to more accurately simulate samples that charge. Approach: The improvements include both modeling of low energy electron scattering by first-principle approaches and charging of insulators by the redistribution of the charge carriers in the material with an electron beam-induced conductivity and a dielectric breakdown model. Results: The first-principle scattering models provide a more realistic charge distribution cloud in the material and a better match between noncharging simulations and experimental results. The improvements on the charging models, which mainly focus on the redistribution of the charge carriers, lead to a smoother distribution of the charges and better experimental agreement of charging simulations. Conclusions: Combined with a more accurate tracing of low energy electrons in the electric field, we managed to reproduce the dynamically changing charging contrast due to an induced positive surface potential.

中文翻译：

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在扫描电子显微镜中模拟充电的模型改进

摘要。背景：绝缘体的充电是一种复杂的模拟现象，因为模拟的准确性对电子与物质和电场的相互作用非常敏感。目标：在这项研究中，我们报告了先前开发的蒙特卡罗模拟器的模型改进，以更准确地模拟充电样本。方法：改进包括通过第一原理方法对低能电子散射进行建模，以及通过使用电子束诱导的电导率和介电击穿模型在材料中重新分布电荷载流子对绝缘体充电。结果：第一性原理散射模型在材料中提供了更真实的电荷分布云，并且在不带电模拟和实验结果之间提供了更好的匹配。充电模型的改进，主要关注电荷载体的重新分布，导致电荷分布更平滑，充电模拟的实验一致性更好。结论：结合对电场中低能电子的更准确追踪，我们设法再现了由于感应正表面电位而引起的动态变化的充电对比度。