Recently, the demand for miniaturization and high sensitivity of the capacitive proximity sensors has increased noticeably for development of sensor networks. However, the volume and weight of conventional sensor devices are emerging as limitations in the practical application. In this paper, the stacked electrets-based highly sensitive noncontact capacitive sensor system (SENS) is proposed. The SENS is fabricated in compact-sized and light weight because electrets, which are dielectric materials that have quasi-permanent injected electric charges so can form external electric field, substitute the transmitter electrode and the external power source. Also, sensitivity of the SENS is effectively improved by stacking electrets. For experimental analysis, the electrostatic properties of the stacked electrets, which are due to the injected charges, and resultant influences on the sensitivity of the SENS are studied. In addition, based on experimental results, a proximity notification system with the SENS is developed using a LabVIEW program to demonstrate the practicality of the SENS.

中文翻译：

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基于叠层单电荷驻极体的高灵敏度电容式接近传感器的研制

最近，随着传感器网络的发展，对电容式接近传感器的小型化和高灵敏度的需求显着增加。然而，传统传感器设备的体积和重量正在成为实际应用中的限制。在本文中，提出了基于堆叠驻极体的高灵敏度非接触式电容传感器系统 (SENS)。SENS 制造紧凑、重量轻，因为驻极体是具有准永久注入电荷的介电材料，因此可以形成外部电场，可替代发射器电极和外部电源。此外，通过堆叠驻极体有效地提高了 SENS 的灵敏度。对于实验分析，堆叠驻极体的静电特性，这是由于注入的电荷，及其对 SENS 灵敏度的影响进行了研究。此外，基于实验结果，利用LabVIEW程序开发了带有SENS的接近通知系统，以证明SENS的实用性。