We use the fixed beam moving stage (FBMS) electron beam lithography technique to pattern a 10 mm long slot waveguide with s-bend tapered double-tip couplers. The fabrication method solves two major limitations of the FBMS mode, namely, the requirement for fixed-width structures and the incidence of stage placement drift for patterns involving elements of different widths. This has been achieved by fracturing the outline of the structure into fixed-width elements of gradually increasing width and creating intermediate overlap areas between the elements to mitigate the stage placement drifts.

中文翻译：

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带有 s 弯锥形耦合器的长无缝槽波导，适用于使用电子束光刻的红外传感应用

我们使用固定光束移动台 (FBMS) 电子束光刻技术来图案化 10 毫米长的槽波导和 s 弯曲锥形双尖耦合器。该制造方法解决了 FBMS 模式的两个主要限制，即对固定宽度结构的要求和涉及不同宽度元素的图案的阶段放置漂移的发生率。这是通过将结构的轮廓分成宽度逐渐增加的固定宽度元素并在元素之间创建中间重叠区域以减轻阶段放置漂移来实现的。