Using a self-consistent plasma model coupled with Maxwell's equations, the limitations of independent control of ion fluxes and their energy distribution functions extracted from the high-density inductively coupled chlorine plasma are studied. Two extreme cases of discharge power are considered: 100 W and 1 kW. We find that in the low-power case, plasma is mainly generated by electromagnetic waves while the radio-frequency biased electrode primarily enables plasma ion extraction. Therefore, the ion fluxes and distribution functions are controlled independently. For the high-power case of 1 kW, the bias electrode significantly contributes to plasma generation but has only a small effect on sheath voltage. As a consequence, independent control of ion fluxes and distribution functions becomes impossible. Namely, the increase in the power driving the radio-frequency electrode leads to the increase in the ion fluxes but has little effect on their energy and angular distributions.

中文翻译：

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高密度电感耦合氯等离子体中离子通量和能量分布函数独立控制的局限性

使用与麦克斯韦方程耦合的自洽等离子体模型，研究了独立控制离子通量的局限性及其从高密度电感耦合氯等离子体中提取的能量分布函数。考虑放电功率的两种极端情况：100 W 和 1 kW。我们发现，在低功率情况下，等离子体主要由电磁波产生，而射频偏压电极主要实现等离子体离子提取。因此，离子通量和分布函数是独立控制的。对于 1 kW 的大功率情况，偏压电极对等离子体的产生有显着贡献，但对鞘层电压的影响很小。因此，离子通量和分布函数的独立控制变得不可能。即，