The micro-electromechanical system (MEMS) infrared thermopile is the core working device of modern information detection systems such as spectrometers, gas sensors, and remote temperature sensors. We presented two different structures of MEMS infrared thermopiles based on suspended film structures. They both deposited silicon nitride over the entire surface as a passivated absorber layer in place of a separate absorber zone, and the thermocouple strip was oriented in the same direction as the temperature gradient. The same MEMS preparation process was used and finally two different structures of the thermopile were characterized separately for testing to verify the impact of our design on the detector. The test results show that the circular and double-ended symmetrical thermopile detectors have responsivities of 27.932 V/W and 23.205 V/W, specific detectivities of 12.1×10⁷ cm·Hz^1/2·W⁻¹ and 10.1×10⁷ cm·Hz^1/2·W⁻¹, and response time of 26.2 ms and 27.06 ms, respectively. In addition, rectangular double-ended symmetric thermopile has a larger field of view than a circular thermopile detector, but is not as mechanically stable as a circular thermopile.

微机电系统（MEMS）红外热电堆是光谱仪、气体传感器、远程温度传感器等现代信息检测系统的核心工作器件。我们展示了两种不同结构的基于悬膜结构的 MEMS 红外热电堆。他们都将氮化硅沉积在整个表面上作为钝化吸收层代替单独的吸收区，并且热电偶条的方向与温度梯度相同。使用相同的 MEMS 制备工艺，最后分别表征两种不同结构的热电堆进行测试，以验证我们的设计对探测器的影响。测试结果表明，圆形和双端对称热电堆探测器的响应度分别为27.932 V/W和23.205 V/W，⁷ cm·Hz ^1/2 ·W ^-1和10.1×10 ⁷ cm·Hz ^1/2 ·W ^-1，响应时间分别为26.2 ms和27.06 ms。此外，矩形双端对称热电堆比圆形热电堆检测器具有更大的视场，但机械稳定性不如圆形热电堆。