X-ray fluorescence (XRF) is frequently used to measure layer thickness in the micrometer range. But also X-ray diffraction (XRD) can be used in a comparable way and offers the benefit to differentiate coating layers by their crystal structure. Thus, the thickness of different oxide layers of the same element can be determined, e.g., FeO, Fe3O4, and Fe2O3 on Fe-substrate. An approach for such measurement is discussed. Furthermore, with a suitable sample stage, a spatially resolved coating thickness map can be measured in a nondestructive way. Applications and validations of the presented XRD method for the measurement of the thickness of zinc coatings on steel are given and compared with results from XRF, glow-discharge optical emission spectroscopy, and optical micrographs. In addition, the methodology was tested and validated using XRF reference standards and iron nitride and iron oxide layers.

X 射线荧光 (XRF) 经常用于测量微米范围内的层厚度。而且 X 射线衍射 (XRD) 也可以以类似的方式使用，并具有通过晶体结构区分涂层的优点。因此，可以确定同一元素的不同氧化物层的厚度，例如FeO、Fe 3 O 4和Fe 2 O 3在铁基体上。讨论了这种测量的方法。此外，利用合适的样品台，可以以非破坏性的方式测量空间分辨的涂层厚度图。给出了所提出的 XRD 方法在测量钢上锌涂层厚度方面的应用和验证，并与 XRF、辉光放电发射光谱和光学显微照片的结果进行了比较。此外，该方法还使用 XRF 参考标准以及氮化铁和氧化铁层进行了测试和验证。