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On temporally periodic physical vapor deposition on random rough surfaces
Journal of Nanophotonics ( IF 1.5 ) Pub Date : 2023-07-01 , DOI: 10.1117/1.jnp.17.036005
Ricardo A. Fiallo 1 , Chengzhi Li 1 , Akhlesh Lakhtakia 1 , Mark W. Horn 1
Affiliation  

Temporally periodic physical vapor deposition (TP-PVD) is commonly used to fabricate Bragg mirrors on planar surfaces. These devices are notionally of infinite transverse extent and homogeneity, but they have periodically nonhomogeneous electromagnetic constitutions in the thickness direction. Undertaking TP-PVD in two different formats, we found that the Bragg phenomenon can be avoided in certain thin-film applications by undertaking TP-PVD on surfaces roughened randomly on the scale of the wavelength.

中文翻译:

随机粗糙表面上的时间周期性物理气相沉积

时间周期物理气相沉积(TP-PVD)通常用于在平面上制造布拉格反射镜。这些装置理论上具有无限的横向范围和均匀性,但它们在厚度方向上具有周期性不均匀的电磁结构。通过以两种不同的形式进行 TP-PVD,我们发现在某些薄膜应用中,通过在波长范围内随机粗糙化的表面上进行 TP-PVD 可以避免布拉格现象。
更新日期:2023-07-01
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