ABSTRACT

(AlCrNbSiTi)N coatings were prepared by arc ion plating at a bias voltage in the range of −50 to −200 V. The as-deposited coatings were all found to have a face-centred cubic structure and exhibit columnar crystal. Si₃N₄ is distributed in the columnar grains in the form of a network, which separates the columnar grains into fine grains. Si₃N₄ presents a crystalline state and grows coherently with the surrounding grains to form a nc-(AlCrNbTi)N/nc-Si₃N₄ nanocomposite structure. The coating with the finest mechanical characteristics was applied at −200 V. The hardness, elastic modulus and wear rate are 34.76, 425 GPa and 0.82 × 10⁻⁹ mm³ N⁻¹ m⁻¹, respectively. Based on the outstanding mechanical performance of the coating, it is concluded that the (AlCrNbSiTi)N protective coating has a broad range of potential applications.

摘要

在-50至-200 V的偏置电压下通过电弧离子镀制备(AlCrNbSiTi)N涂层。发现沉积的涂层均具有面心立方结构并呈现柱状晶体。Si ₃ N ₄以网状分布在柱状晶中，将柱状晶分隔成细小的晶粒。Si ₃ N ₄呈现晶态并与周围晶粒共格生长，形成nc-(AlCrNbTi)N/nc-Si ₃ N ₄纳米复合结构。在-200 V下涂覆具有最佳机械特性的涂层。硬度、弹性模量和磨损率分别为34.76、425 GPa和0.82 × 10 ^-9 mm ³分别为N ^-1 m ^-1。基于涂层优异的机械性能，得出结论：(AlCrNbSiTi)N防护涂层具有广泛的潜在应用。