Yield Methodology and Heater Process Variation in Phase Change Memory (PCM) Technology for Analog Computing,IEEE Transactions on Semiconductor Manufacturing

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Yield Methodology and Heater Process Variation in Phase Change Memory (PCM) Technology for Analog Computing
IEEE Transactions on Semiconductor Manufacturing ( IF 2.7 ) Pub Date : 2023-06-08 , DOI: 10.1109/tsm.2023.3284313
Victor Chan ₁ , A. Gasasira ₁ , R. Pujari ₁ , W.-T. Tseng ₁ , T. Gordon ₁ , R. Southwick ₁ , I. Ok ₁ , S. Choi ₁ , C. Silvestre ₁ , H. Utomo ₁ , K. Brew ₁ , T. Philip ₁ , G. W. Burr ₂ , N. Saulnier ₁ , S. Teehan ₁ , I. Ahsan ₁

Affiliation

We discuss inline electrical testing to monitor the baseline of Analog Computing hardware using Phase Change Memory (PCM) technology. Tightening the PCM resistance distribution is necessary to meet analog computation requirement. A new yield methodology is introduced. A study of heater process variation, which will affect the heater height and the PCM resistance, will be discussed.

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