In this study, in an electret capacitor sensor (ECS), which is an electromechanical exchange device consisting of an electret sandwiched between two electrodes, ridges as spacers and grooves as gaps were formed in the PTFE (polytetrafluoroethylene) layer of the insulating electrode by laser ablation. The ECSs were then fabricated using PTFE electrets, and the charge retention and airborne ultrasonic wave transmitting and receiving characteristics were investigated. The charge retention characteristics of the ECS with laser-patterned insulating electrodes were slightly lower than those of the silica-aggregate electret. As the thickness of the insulating layer increased or the groove width decreased, the transmitting and receiving sensitivity increased significantly and then peaked and degraded at the measurements of transmitting and receiving. The ECS with the highest peak sensitivity obtained by laser patterning had a bandwidth comparable to that of the conventional ECS with silica aggregate electret, but the peak sensitivity was improved by up to 8 dB. Therefore, laser patterning could contribute to the improvement of ECS performance.

中文翻译：

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激光图案化驻极体超声波传感器的制作及特性

在这项研究中，驻极体电容器传感器（ECS）是一种机电交换装置，由夹在两个电极之间的驻极体组成，通过激光在绝缘电极的PTFE（聚四氟乙烯）层上形成作为间隔物的脊和作为间隙的凹槽。消融。然后使用PTFE驻极体制造ECS，并研究电荷保持和空气传播超声波发射和接收特性。具有激光图案化绝缘电极的ECS的电荷保持特性略低于二氧化硅聚集体驻极体的电荷保持特性。随着绝缘层厚度的增加或凹槽宽度的减小，发射和接收灵敏度显着增加，然后在发射和接收测量时达到峰值并下降。通过激光图案化获得的最高峰值灵敏度的ECS的带宽与传统二氧化硅聚集体驻极体ECS的带宽相当，但峰值灵敏度提高了高达8 dB。因此，激光图案化有助于提高 ECS 性能。