This paper addresses a pressure sensor for body pressure measurement. Many pressure sensors have been developed for disease treatment in the medical field. However, these sensors require inserting electronic components and other sensor elements via surgical operations, so the measurement physically burdens patients. Hence, we proposed a needle-type pressure sensor using MEMS (Micro Electro Mechanical Systems) cantilever. The sensor has a needle part with a thin membrane on the tip and is filled with incompressible fluid inside. The fractional resistance of the built-in piezoresistive cantilever varies according to the pressure change applied to the needle tip. We can measure body fluid pressure with minimal surgery by inserting a simple needle into the target organ. Because the fabricated sensor responded to pseudo-body pressure changes, it was suggested that the fabricated needle-type pressure sensor could detect pressure inside the body.

中文翻译：

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内部有硅油和聚对二甲苯膜的针式压力传感器，可进行微创测量

本文讨论了一种用于身体压力测量的压力传感器。许多压力传感器已被开发用于医疗领域的疾病治疗。然而，这些传感器需要通过外科手术插入电子元件和其他传感器元件，因此测量会给患者带来身体负担。因此，我们提出了一种使用 MEMS（微机电系统）悬臂梁的针式压力传感器。传感器有一个尖端带有薄膜的针部分，内部充满不可压缩的流体。内置压阻悬臂梁的分数电阻根据施加到针尖的压力变化而变化。我们可以通过将一根简单的针插入目标器官，以最少的手术测量体液压力。因为制造的传感器响应伪身体压力变化，