We describe the experimental implementation of high-resolution soft X-ray spectrographs, which are stigmatic throughout their operating range. The optical configuration comprises a grazing-incidence plane VLS grating and a broadband normal-incidence focusing mirror with an aperiodic multilayer coating structure. The operating range is defined by the aperiodic multilayer mirror in use (Mo/Si: 12.5 – 25 nm; Mo/Be: 11 – 14 nm). The spectral resolution is determined by CCD detector resolution and is numerically equal to the product of the plate scale and the double pixel size. Vertically spaceresolved laser-produced plasma spectra of multiply charged ions are presented. The spatial resolution is equal to about 26 μm, the double pixel size. We discuss the prospect of extending high-resolution stigmatic spectral imaging below 11 nm and outline the data of numerical calculations of broadband normal-incidence mirrors based on aperiodic Ru/Sr and La/B₄C multilayer structures.

我们描述了高分辨率软 X 射线光谱仪的实验实现，该光谱仪在整个工作范围内都是像斑的。光学配置包括掠入射平面VLS光栅和具有非周期多层镀膜结构的宽带垂直入射聚焦镜。工作范围由所使用的非周期性多层镜定义（Mo/Si：12.5 – 25 nm；Mo/Be：11 – 14 nm）。光谱分辨率由 CCD 探测器分辨率决定，在数值上等于板尺寸和双像素尺寸的乘积。提出了多带电离子的垂直空间分辨激光产生的等离子体光谱。空间分辨率约为 26 μm，即双像素尺寸。_4C多层结构。