Montel mirror coated by laterally graded multilayer is a key two-dimensional collimating optics for x-ray analysis instrument. To provide guidance for the fabrication, the collimation property of a W/Si multilayer Montel mirror with parabolic shape is simulated systematically by a ray-tracing program. The influence of different source sizes, multilayer reflection bandwidth, mirror-detector distance, figure errors, and the assembly errors on the collimation performance is simulated. The mechanism for the change of divergence angle, collimation efficiency, beam uniformity, and so on is analyzed. Based on the results, the optimum mirror structure and the tolerance for fabrication and assembly errors were estimated for a high-performance x-ray Montel mirror.

中文翻译：

---

多层镀膜X射线Montel镜二维准直特性的理论研究

横向梯度多层镀膜Montel镜是X射线分析仪器的关键二维准直光学器件。为了给制造提供指导，通过光线追踪程序系统地模拟了抛物线形状的W/Si多层Montel镜的准直特性。模拟了不同光源尺寸、多层反射带宽、镜-探测器距离、图形误差和装配误差对准直性能的影响。分析了发散角、准直效率、光束均匀性等变化的机理。根据结果​​，评估了高性能 X 射线蒙特尔反射镜的最佳反射镜结构以及制造和装配误差的公差。