To accurately characterize the geometric form of key components in industrial products, many profile measuring instruments have been developed to date. However, there are some special components, such as the hemispherical resonators featuring thin curved transparent surfaces, which are difficult to be measured using general instruments. The chromatic confocal technology was introduced in this paper to conduct the bilateral form characterization of this type of surfaces. Based on the assumption of tilted plate approximation, a modified ray tracing model was presented to correct the errors produced by the curved surfaces. The experiment of measurement on tilted, fused silica plates was conducted to demonstrate the effectiveness of the proposed model. Results show that the developed model improves the measurement accuracy of plates with large tilt angle. A three-axis motion stage was built with self-developed chromatic confocal sensor to obtain the bilateral profiles of the resonator. By fitting the spheres with the scanning profiles, the form error between the measurement points and the fitted spheres can be calculated. Partial form errors along the circumferential and axial directions of the resonator are evaluated, and an intuitive assessment of its thickness variation along the circumferential direction was made.

中文翻译：

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使用彩色共焦传感器对弯曲透明组件进行双边形状表征

为了准确表征工业产品中关键部件的几何形状，迄今为止已经开发了许多轮廓测量仪器。然而，有一些特殊部件，例如具有薄弯曲透明表面的半球形谐振器，很难使用通用仪器进行测量。本文引入彩色共焦技术来进行此类表面的双边形状表征。基于倾斜板近似的假设，提出了一种改进的光线追迹模型来校正曲面产生的误差。在倾斜的熔融石英板上进行了测量实验，以证明该模型的有效性。结果表明，所建立的模型提高了大倾斜角板材的测量精度。采用自主开发的彩色共焦传感器搭建了三轴运动平台，以获得谐振器的双边轮廓。通过将球体与扫描轮廓进行拟合，可以计算测量点与拟合球体之间的形状误差。评估了谐振器沿周向和轴向的部分形状误差，并直观地评估了其沿周向的厚度变化。