Achieving an atomically smooth surface without damage or grain boundary steps is crucial for yttrium aluminum garnet (YAG) ceramics to deliver high-power laser oscillation and stable output. We propose a wet etching method that utilizes a thin-film catalyst, enabling the topmost crystal grain to be selectively removed through a catalyzed chemical reaction. This study demonstrates the effectiveness of the proposed method by polishing Nd- and Yb-doped YAG ceramic substrates. We realized damage-free surfaces having steps with a height of less than 1.0 nm. Such surfaces can effectively deliver high-power laser oscillation with high output stability.

对于钇铝石榴石 (YAG) 陶瓷来说，实现原子级光滑的表面而无损伤或晶界台阶对于提供高功率激光振荡和稳定输出至关重要。我们提出了一种利用薄膜催化剂的湿法蚀刻方法，能够通过催化化学反应选择性地去除最上面的晶粒。本研究通过抛光 Nd 和 Yb 掺杂 YAG 陶瓷基板证明了所提出方法的有效性。我们实现了台阶高度小于 1.0 nm 的无损伤表面。这种表面可以有效地提供具有高输出稳定性的高功率激光振荡。