In this study, we compare the robustness of optical constants and optical band gap determination of three different materials: SiGe, N-doped HfO₂ and MoO_x, using the combination of two techniques: spectroscopic ellipsometry, and energy loss signal (ELS) of X-ray photoelectron spectroscopy (XPS). The determination of such physical properties is achieved through the hybridization of the two techniques based on multiple Tauc-Lorentz model, applied on the whole energy range of measurement.

Such use of hybridized data demonstrates a new robust method to determine the band gap of the studied materials, together with the optical indices (refractive index and extinction coefficient) on a wide energy range (up to 40 eV). This method provides an extension of determination of the relevant physical quantities compared to each technique on their own.

Moreover, this algorithm is tested on limit conditions, where the energy ranges of measurement of the two respective techniques presented no overlap. Yet the use of a unique physical model still allows us to calculate the different physical quantities even on the energy range where no measurement is performed, validating the semi-predictive nature of the hybrid technique. Additional measurements under different experimental configurations validate the extended scope of such hybrid technique.

在本研究中，我们结合两种技术：光谱椭圆光度法和能量损失信号 (ELS)，比较了三种不同材料：SiGe、N 掺杂 HfO ₂和 MoO _x的光学常数和光学带隙测定的鲁棒性。X 射线光电子能谱 (XPS)。这种物理性质的确定是通过基于多重 Tauc-Lorentz 模型的两种技术的混合来实现的，应用于整个测量能量范围。

这种混合数据的使用展示了一种新的稳健方法来确定所研究材料的带隙，以及宽能量范围（高达 40 eV）上的光学指数（折射率和消光系数）。与每种技术本身相比，该方法提供了相关物理量确定的扩展。

此外，该算法是在极限条件下进行测试的，其中两种技术的测量能量范围没有重叠。然而，使用独特的物理模型仍然允许我们即使在未执行测量的能量范围内计算不同的物理量，从而验证了混合技术的半预测性质。不同实验配置下的额外测量验证了这种混合技术的扩展范围。