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Development of a method for attaching thin films to curved surfaces using a bipolar electrostatic chuck with a collective beam structure
Advanced Robotics ( IF 2 ) Pub Date : 2023-12-08 , DOI: 10.1080/01691864.2023.2279603 Yuki Taoka 1 , Terumichi Hayashi 2 , Sanchuan Xu 2 , Shigeki Saito 1
Advanced Robotics ( IF 2 ) Pub Date : 2023-12-08 , DOI: 10.1080/01691864.2023.2279603 Yuki Taoka 1 , Terumichi Hayashi 2 , Sanchuan Xu 2 , Shigeki Saito 1
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A bipolar electrostatic chuck (ESC) having a collective beam structure is getting attention as an effective device for handling thin, soft dielectric objects such as polymer film or paper. It has b...
中文翻译：
开发使用具有集合梁结构的双极静电吸盘将薄膜附着到曲面的方法
具有集体梁结构的双极静电吸盘（ESC）作为处理聚合物薄膜或纸张等薄而软的介电物体的有效装置而受到关注。它有...
更新日期：2023-12-10
中文翻译：
开发使用具有集合梁结构的双极静电吸盘将薄膜附着到曲面的方法
具有集体梁结构的双极静电吸盘（ESC）作为处理聚合物薄膜或纸张等薄而软的介电物体的有效装置而受到关注。它有...
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