Abstract

TiN coatings have been deposited using cathodic arc deposition at various nitrogen pressures and deposition temperatures. The structure and elemental coating composition are analyzed using a scanning electron microscope and an energy dispersive spectrometer. The mechanical properties and adhesion strength of the coating are measured using nanoindentation and scratch testing. The degree of wear is investigated with a tribometer using the ball-on-disk test method. The analysis of the results is carried out by the methods of two-factor orthogonal experiment planning with optimization elements. The results show that the coating structure has a columnar (fibrous) morphology, the composition is close to stoichiometric. The moment of coating destruction, when determining the adhesive strength, occurs at a load of about 600 mN. On the basis of the obtained regression equations for the optimized values of hardness, plasticity index and wear degree, the values of the process parameters of deposition should be in intervals T = 350–430°С and P = 0.065–0.075 Pa.

中文翻译：

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获得 TiN 真空离子等离子体涂层的基本工艺因素对其机械和摩擦学特性的影响

摘要

TiN 涂层是使用阴极电弧沉积在不同的氮气压力和沉积温度下沉积的。使用扫描电子显微镜和能量色散光谱仪分析结构和元素涂层成分。使用纳米压痕和划痕测试来测量涂层的机械性能和粘附强度。使用摩擦计采用球盘测试方法来研究磨损程度。采用优化单元二因素正交试验规划方法对结果进行分析。结果表明，涂​​层结构具有柱状（纤维状）形貌，成分接近化学计量。当确定粘合强度时，涂层破坏的时刻发生在约 600 mN 的负载下。根据获得的硬度、塑性指数和磨损度优化值的回归方程，沉积工艺参数的值应在T = 350–430°С和P  = 0.065–0.075 Pa的区间内。