In this study, the gas pressure dependence of optical and mechanical characteristics in reactive sputtered SiCO thin films for optical guided-wave pressure sensors was experimentally investigated. Thin films were fabricated by varying the gas pressure from 0.3 to 1.0 Pa at an oxygen flow ratio of 6%, and the gas pressure dependences was clarified. As the gas pressure increased, the optical bandgap of the SiCO thin film increased, resulting in a transparent SiCO films. On the other hand, the refractive index, young's modulus, and hardness decreased with increasing gas pressure. Combining this dependence with the oxygen inflow ratio dependence of the previous study, the first-order approximation formula for the gas pressure and oxygen flow rate ratio for various film characteristics was obtained. Based on this equation, trajectories of equal bandgaps and equal young's moduli on the oxygen flow ratio—gas pressure plane were created on the oxygen influx ratio-gas pressure coordinates, making it easy to fabricate waveguides with desired characteristics.

中文翻译：

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反应溅射法光波导用 SiCO 薄膜的光学和机械性能与气压的关系

在本研究中，通过实验研究了用于光导波压力传感器的反应溅射 SiCO 薄膜的光学和机械特性对气体压力的依赖性。通过在氧气流量比为6%的情况下将气压从0.3Pa改变至1.0Pa来制造薄膜，并阐明了气压依赖性。随着气压的增加，SiCO薄膜的光学带隙增加，形成透明的SiCO薄膜。另一方面，折射率、杨氏模量和硬度随着气压的增加而降低。将此依赖性与先前研究的氧气流入比率依赖性相结合，获得了各种薄膜特性的气体压力和氧气流量比率的一阶近似公式。基于该方程，在氧气流量比-气压坐标上创建了氧气流量比-气压平面上的等带隙和等杨氏模量的轨迹，从而可以轻松制造具有所需特性的波导。