We report on initial fabrication efforts in the integration of superconducting nanowire single-photon detectors (SNSPDs) with vertically aligned carbon nanotubes (VACNTs) with the goal of creating a wideband single-photon detector. SNSPDs provide high detection efficiencies and low dark count rates, while the VACNTs are excellent broadband optical absorbers. Combining these technologies could potentially enable the development of highly sensitive and versatile optical sensors for a variety of applications, such as spectroscopy, optical communication, and imaging in light starved environments. We developed two fabrication processes for the integration of VACNTs on SNSPDs. The first involves capping the SNSPDs with a protective layer and growing the VACNTs directly above nanowires. Thermal and electrical characterizations of the devices demonstrated a degradation of the superconducting qualities of the SNSPDs. The second process involved suspending the SNSPDs on a thin membrane via a backside etch, where VACNTs were then grown on the backside of the membranes below the nanowires. The membrane style devices showed no degradation in the superconducting properties of the nanowires. Measurements of the membrane style devices before and after the VACNT growth display similar superconducting properties and photon count rates.

中文翻译：

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垂直排列碳纳米管与超导纳米线单光子探测器的集成


我们报告了超导纳米线单光子探测器（SNSPD）与垂直排列碳纳米管（VACNT）集成的初步制造工作，目标是创建宽带单光子探测器。 SNSPD 提供高检测效率和低暗计数率，而 VACNT 是出色的宽带光学吸收体。结合这些技术可能会开发出适用于各种应用的高灵敏度和多功能光学传感器，例如光谱学、光通信和光匮乏环境中的成像。我们开发了两种将 VACNT 集成到 SNSPD 上的制造工艺。第一种方法是用保护层覆盖 SNSPD，并在纳米线上直接生长 VACNT。器件的热学和电学特性表明 SNSPD 的超导质量有所下降。第二个过程涉及通过背面蚀刻将 SNSPD 悬浮在薄膜上，然后在纳米线下方的膜背面生长 VACNT。膜式装置显示纳米线的超导特性没有退化。在 VACNT 生长之前和之后对膜式器件的测量显示出相似的超导特性和光子计数率。