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A simple, static and stage mounted direct electron detector based electron backscatter diffraction system
Micron ( IF 2.4 ) Pub Date : 2023-12-22 , DOI: 10.1016/j.micron.2023.103582
Tianbi Zhang , T. Ben Britton

To engineer the next generation of advanced materials we must understand their microstructure, and this requires microstructural characterization. This can be achieved through the collection of high contrast, data rich, and insightful microstructural maps. Electron backscatter diffraction (EBSD) has emerged as a popular tool available within the scanning electron microscope (SEM), where maps are realized through the repeat capture and analysis of Kikuchi diffraction patterns. Typical commercial EBSD systems require large and sophisticated detectors that are mounted on the side of the SEM vacuum chamber which can be limiting in terms of widespread access to the technique. In this work, we present an alternative open-hardware solution based upon a compact EBSD system with a simple, static geometry that uses an off-the-shelf direct electron detector co-mounted with a sample. This simple stage is easy to manufacture and improves our knowledge of the diffraction geometry significantly. Microscope and detector control is achieved through software application programming interface (API) integration. After pattern capture, analysis of the diffraction patterns is performed using open-source analysis within AstroEBSD. To demonstrate the potential of this set up, we present two simple EBSD experiments using a line scan and area mapping. We hope that the present system can inspire simpler EBSD system design for widespread access to the EBSD technique and promote the use of open-source software and hardware in the workflow of EBSD experiments.



中文翻译:

一种基于电子背散射衍射系统的简单、静态、安装在舞台上的直接电子探测器

为了设计下一代先进材料,我们必须了解它们的微观结构,这需要微观结构表征。这可以通过收集高对比度、数据丰富且富有洞察力的微观结构图来实现。电子背散射衍射 (EBSD) 已成为扫描电子显微镜(SEM) 中的一种流行工具,通过重复捕获和分析菊池衍射图案来实现图谱。典型的商用 EBSD 系统需要安装在 SEM 真空室侧面的大型且复杂的探测器,这可能会限制该技术的广泛使用。在这项工作中,我们提出了一种基于紧凑型 EBSD 系统的替代开放硬件解决方案,该系统具有简单的静态几何结构,使用与样品共同安装的现成直接电子探测器。这个简单的平台易于制造,并显着提高了我们对衍射几何的了解。显微镜和探测器控制是通过软件应用程序编程接口(API)集成来实现的。图案捕获后,使用 AstroEBSD 内的开源分析对衍射图案进行分析。为了展示该设置的潜力,我们使用线扫描和区域映射进行了两个简单的 EBSD 实验。我们希望本系统能够激发更简单的 EBSD 系统设计,以广泛使用 EBSD 技术,并促进开源软件和硬件在 EBSD 实验工作流程中的使用。

更新日期:2023-12-22
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