Ni-Mn-Ga-based magnetic shape memory (MSM) alloy microactuators have a high potential in miniaturized devices for which conventional mechanisms or materials are no longer feasible. However, manufacturing single-crystal-based Ni-Mn-Ga micro actuators is challenging due to their high brittleness, which precludes conventional machining methods. The present work introduces and develops a novel manufacturing method – femtosecond pulse width laser (FPWL) ablation micromachining – for the manufacture of a functional actuators from oriented Ni-Mn-Ga single crystals. Notably, using a green laser (wavelength 515 nm) permits micromachining in the martensitic phase due to the low heating effect of the process. Optimized FPWL parameters are here used to machine a functional actuator from a five-layered modulated (10 M) martensite Ni-Mn-Ga single crystal. The actuator develops a fully reversible and repeatable magnetic-field-induced strain of 6.5% without any post-processing.

Ni-Mn-Ga 基磁性形状记忆 (MSM) 合金微执行器在传统机制或材料不再可行的小型化设备中具有巨大潜力。然而，由于其高脆性，制造基于单晶的 Ni-Mn-Ga 微型执行器具有挑战性，这妨碍了传统的加工方法。目前的工作介绍并开发了一种新颖的制造方法——飞秒脉冲宽度激光（FPWL）烧蚀微加工——用于用定向 Ni-Mn-Ga 单晶制造功能执行器。值得注意的是，由于该工艺的热效应较低，使用绿色激光（波长 515 nm）可以在马氏体相中进行微加工。优化的 FPWL 参数用于从五层调制 (10 M) 马氏体 Ni-Mn-Ga 单晶加工功能执行器。该执行器无需任何后处理即可产生完全可逆且可重复的 6.5% 磁场感应应变。