Aluminium nitride (AlN) ceramic is a typically difficult-to-machine material used in electronic packaging. Laser and chemical milling enhanced micro milling (LCMEM), a high-quality and efficient processing method for AlN, is proposed in this study. Rough machining is completed by repeated alternating laser ablation and chemical removal; the final finish is achieved by micro milling (MM). To achieve precise laser and chemical milling parameters based on the target structure, a laser and chemical milling (LCM) prediction model is established and verified; this can be used to predict the morphology of the grooves after LCM. The change trend of the grooves after LCM with the laser parameters is investigated. It was found that LCMEM can improve the surface quality by 60 %, and an optimal finishing surface with a surface roughness Ra value of 54 nm can be obtained when the feed per tooth is 0.4 µm/z. Lastly, this study uses LCMEM to produce a high aspect ratio groove with aspect ratio of 2.5 and depth of 1250 µm. Compared with conventional MM, LCMEM reduces the allowance of MM by 71.95 %, improves the groove accuracy, and reduces tool wear.

氮化铝( AlN) 陶瓷是一种用于电子封装的典型难加工材料。本研究提出了激光和化学铣削增强微铣削（LCMEM），这是一种高质量、高效的 AlN 加工方法。通过反复交替的激光烧蚀和化学去除完成粗加工；最终的精加工是通过微铣削 (MM) 实现的。为了实现基于目标结构的精确激光和化学铣削参数，建立并验证了激光和化学铣削（LCM）预测模型；这可用于预测 LCM 后凹槽的形态。研究了LCM后凹槽随激光参数的变化趋势。结果发现，LCMEM可以提高表面质量60%，当每齿进给量为0.4 µm/z时，可以获得表面粗糙度Ra值为54 nm的最佳精加工表面。最后，本研究使用 LCMEM 生产出深宽比为 2.5、深度为 1250 µm 的高深宽比凹槽。与传统MM相比，LCMEM减少MM余量71.95%，提高坡口精度，减少刀具磨损。