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Effects of methane concentration on tribological properties of diamond films prepared on different ceramic substrates
Fullerenes, Nanotubes and Carbon Nanostructures ( IF 2.3 ) Pub Date : 2024-01-18 , DOI: 10.1080/1536383x.2024.2302511
Tongxiang Zheng 1 , Lixiu Zhang 1 , Yuhou Wu 1, 2 , Feng Lu 1 , Xu Bai 3 , He Wang 1, 2
Affiliation  

Diamond films were prepared on silicon nitride and zirconia ceramic substrates using hot filament chemical vapor deposition (HFCVD). The surface morphology, friction, and wear properties of the dia...

中文翻译:

甲烷浓度对不同陶瓷基体金刚石膜摩擦学性能的影响

使用热丝化学气相沉积(HFCVD)在氮化硅和氧化锆陶瓷基底上制备金刚石薄膜。直径的表面形貌、摩擦和磨损性能...
更新日期:2024-01-21
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