Abstract

A pulsed RF discharge is considered experimentally as a working process of an RF ion source. It is shown that an increase in the ion current can be obtained in comparison with the continuous operation mode when such a discharge is operating. This increase is the greater, the greater the difference between the characteristic time of the drop of the ion current after turning off the RF power and the rise time of the ion current when the RF power is turned on. The pulsation parameters at which the ion current is maximized are estimated. It is shown that an external constant longitudinal magnetic field in the range of 0–7.2 mT nonmonotonically affects the maximum and equilibrium value of the ion current in a pulse and does not affect the decrease rate of the ion current after the RF power is turned off.

中文翻译：

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脉冲感应射频放电作为射频离子源的有效工作过程

摘要

脉冲射频放电在实验上被认为是射频离子源的工作过程。结果表明，当进行这种放电时，与连续操作模式相比可以获得离子电流的增加。关闭RF电源后离子电流下降的特征时间与打开RF电源时离子电流上升时间之间的差异越大，该增加越大。估计离子电流最大化时的脉动参数。结果表明，0~7.2 mT范围内的外部恒定纵向磁场非单调影响脉冲中离子电流的最大值和平衡值，并且不影响射频功率关闭后离子电流的下降率。