Evidence for molecular tungsten ionic species presence in impurity-seeded hydrogen plasma in contact with W surfaces,Plasma Processes and Polymers

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Evidence for molecular tungsten ionic species presence in impurity-seeded hydrogen plasma in contact with W surfaces
Plasma Processes and Polymers ( IF 3.5 ) Pub Date : 2024-02-08 , DOI: 10.1002/ppap.202300227
Silviu Daniel Stoica ₁ , Cristina Craciun _{1,

2} , Tomy Acsente ₁ , Bogdana Mitu ₁ , Gheorghe Dinescu _{1,

2}

Affiliation

We performed an investigation of tungsten ionic species presence in hydrogen plasmas in contact with a tungsten surface, both in the presence of air impurities and when injected with argon. The study was carried out in a magnetron sputtering system complemented with mass spectrometry diagnostics. Our findings reveal that these plasmas encompass a diverse range of tungsten molecular ionic species in the mass range of 180–250 amu, broadly described as WH_xN_yO_z⁺ (x = 0–3; y = 0–2; z = 0–3). The validity of these results was further confirmed through dedicated mass spectrometry investigations involving tungsten sputtering discharges in argon–nitrogen and argon–oxygen mixtures.

更新日期：2024-02-09

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