The liquid delivery in the semiconductor process is highly protected against leakage and contamination. To avoid the dynamic sealing points in valves, a novel ultra-clean poppet valve driven by permanent magnets is proposed. To reduce the risk of instability due to the lack of a fixed connection structure, static and dynamic characteristic analyses of the valve poppet needs to be carried out. However, the conventional theoretical model of poppet vibration generally focuses on the vibration in axial direction, which lacks consideration of the vibration in lateral direction. Therefore, a new theoretical model for analyzing the vibration characteristics in both axial and lateral directions is proposed. The displacement of poppet and flow response of the valve are predicted. Based on the experimental system of non-contacting displacement measurement, the accuracy of the model is verified. Furthermore, the influence of parameters on the stability is revealed through theoretical calculation, which provides a reference for the design of magnetic actuated valve.

中文翻译：

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一种新型磁力超净提升阀及其动态特性分析

半导体工艺中的液体输送受到严格保护，防止泄漏和污染。为了避免阀门中的动态密封点，提出了一种由永磁体驱动的新型超洁净提升阀。为了降低由于缺乏固定连接结构而导致不稳定的风险，需要对阀门提升阀进行静态和动态特性分析。然而，传统的提升阀振动理论模型普遍关注轴向振动，缺乏对横向振动的考虑。因此，提出了一种分析轴向和横向振动特性的新理论模型。预测了提升阀的位移和阀门的流量响应。基于非接触式位移测量实验系统，验证了模型的准确性。此外，通过理论计算揭示了参数对稳定性的影响，为磁力阀的设计提供参考。