This paper describes and illustrates a convenient, new method for checking repeatability and reproducibility by direct comparisons of measured heights. Focus variation, confocal, and interferometric optical areal profiling have been integrated as modes on the Sensofar S neox and are used here. Repeated, sequential measurements are made with these different types of measurement without repositioning the measurand. Several different positions are measured on the same measurand, an electroformed, standard areal surface with an irregular topography. Height (z) measurements at individual locations (x,y) are plotted between repeated measurements at the same position on the measurand, and are called H–H plots. These plots can be used for rapid evaluations of topographic measurement repeatability on ordinary topographic measurements. Exceptionally, such plots can also be used to see how well one type of measurements can reproduce another, such as confocal, focus variation, and interferometric, when they are integrated as modes on the same measurement instrument. Only when different types of measurement are included as modes on the same instrument can different measurement types be compared directly for reproducing each of the large numbers of locations (>10) in topographic measurements at the same position on a measurand. One way of quantifying repeatability and reproducibility is with coefficients of determination (R) and slopes of linear regression analyses on these H–H plots.

中文翻译：

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直接使用测量高度的线性回归分析比较地形测量类型的重复性和再现性

本文描述并说明了一种通过直接比较测量高度来检查重复性和再现性的便捷新方法。焦点变化、共焦和干涉光学区域分析已作为模式集成在 Sensofar S neox 上，并在此处使用。使用这些不同类型的测量进行重复、连续的测量，而无需重新定位被测量。在同一被测量（具有不规则形貌的电铸标准面积表面）上测量多个不同位置。各个位置 (x,y) 的高度 (z) 测量值是在被测量同一位置的重复测量之间绘制的，称为 H-H 图。这些图可用于快速评估普通形貌测量的形貌测量重复性。特别是，当一种类型的测量作为模式集成在同一测量仪器上时，这些图还可用于查看一种类型的测量在多大程度上再现另一种测量，例如共焦、焦点变化和干涉测量。只有当不同类型的测量作为模式包含在同一仪器上时，才能直接比较不同的测量类型，以再现被测量上同一位置处的地形测量中的大量位置（>10）。量化重复性和再现性的一种方法是使用这些 H-H 图上的确定系数 (R) 和线性回归分析的斜率。