In order to minimize damage to the surface being measured and improve measurement speed, laser triangulation technique has been widely employed in various ultra-precision manufacturing processes and precision instruments. However, several factors such as ambient light interference, scattering of particles in the measuring medium, surface roughness, inclination, and movement of the target surface collectively influence the measurement accuracy of laser triangulation. Therefore, it is crucial to establish an error model and compensate for the measurement errors. This paper investigates the individual and coupled effects of these factors on measurement errors, and based on this analysis, proposes an integrated error model that enables higher-precision measurements using laser triangulation. Additionally, through a combination of modeling and experiments, this research identifies novel phenomena related to the interference caused by different regions of ambient light, surface inclination failure, and the interference caused by particles in the smoke medium. Through a comprehensive compensation experiment across the full measurement range, the average measurement error was reduced by 73%, and no measurement failures were encountered. These results demonstrate the effectiveness of the integrated error model in reducing measurement errors in laser triangulation.Therefore, this study provides valuable insights into improving the accuracy of laser triangulation measurements using an integrated error model.

为了最大限度地减少对被测表面的损伤并提高测量速度，激光三角测量技术已广泛应用于各种超精密制造工艺和精密仪器中。然而，环境光干扰、测量介质中颗粒的散射、目标表面的表面粗糙度、倾斜度和运动等多种因素共同影响激光三角测量的测量精度。因此，建立误差模型并补偿测量误差至关重要。本文研究了这些因素对测量误差的单独和耦合影响，并基于此分析，提出了一种集成误差模型，可以使用激光三角测量实现更高精度的测量。此外，通过建模和实验相结合，本研究发现了与环境光不同区域引起的干扰、表面倾斜故障以及烟雾介质中的颗粒引起的干扰相关的新现象。通过全测量范围的综合补偿实验，平均测量误差降低73%，未出现测量故障。这些结果证明了集成误差模型在减少激光三角测量中的测量误差方面的有效性。因此，本研究为使用集成误差模型提高激光三角测量的精度提供了有价值的见解。