Optical metasurfaces (OMSs), planar arrays of meticulously designed meta-atoms, are renowned for remarkable capabilities in manipulating the polarization state of light at subwavelength scales. Nevertheless, most OMS-empowered polarization optics remain static, featuring well-defined optical responses determined by their configurations set during fabrication. Here, we demonstrate a MEMS-OMS-based dynamic linear polarizer (DLP) with an electrically controlled extinction ratio, which is tunable in a fast and reversible fashion, by combining an anisotropic plasmonic OMS with a thin-film piezoelectric MEMS mirror. Capitalizing on the MEMS-OMS DLP, we further implement voltage-controlled grayscale imaging and vector vortex beam generation under linearly and circularly polarized excitations, respectively. Our MEMS-OMS DLP design could enable adaptive photonic systems for advanced applications in optical image encryption, displays, and beyond.

中文翻译：

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用于动态线性偏振器的 MEMS 集成超表面

光学超表面（OMS）是精心设计的超原子平面阵列，以其在亚波长尺度上操纵光偏振态的卓越能力而闻名。然而，大多数支持 OMS 的偏振光学器件仍然是静态的，具有由制造过程中设置的配置决定的明确的光学响应。在这里，我们展示了一种基于 MEMS-OMS 的动态线性偏振器 (DLP)，该偏振器具有电控消光比，通过将各向异性等离子体 OMS 与薄膜压电 MEMS 镜相结合，可以快速、可逆地调节消光比。利用 MEMS-OMS DLP，我们进一步分别在线性和圆偏振激励下实现压控灰度成像和矢量涡旋光束生成。我们的 MEMS-OMS DLP 设计可以实现自适应光子系统，用于光学图像加密、显示等领域的高级应用。