In this work, low laser intensity levels of 30 and 60 mW/cm from a 410 nm short wavelength laser were used to form a uniform porous layer of silicon muds and pore-like structures utilizing a laser-induced etching pathway. The features of the fabricated sensors were investigated using field emission scanning electron microscopy (FE-SEM), photoluminescence spectroscopy (PL) and RLC measurement. The sensing process depends on recording the changes in the resonant frequency within the series connected RLC circuit after exposure of the sensor to very low concentrations (below the permissible limit) of Thiram pesticide. The performance of the sensors was investigated under concentrations of 1 × 10 M to 3.5 × 10 M of Thiram at room temperature. The results show excellent stability of the reduction rate of about 0.031 % per day with higher sensitivity and minimum detection of about 82 % and 0.25 × 10 M, respectively. The main reason behind this outstanding result is closely related to the specific surface area and density of Si nanocrystallites in the mud morphologies porous layer of about 6 × 10 columns and pores/cm. The fabricated impedance matching circuit is very suitable for the simple and low-cost sensing process for the quantitative detection of Thiram lower than the permissible limit.

中文翻译：

---

基于硅泥和孔状结构的电纳米传感器性能的广泛研究

在这项工作中，使用来自 410 nm 短波长激光的 30 和 60 mW/cm 的低激光强度水平，利用激光诱导蚀刻路径形成硅泥的均匀多孔层和孔状结构。使用场发射扫描电子显微镜 (FE-SEM)、光致发光光谱 (PL) 和 RLC 测量研究了所制造的传感器的特性。传感过程取决于记录传感器暴露于极低浓度（低于允许限度）的福美双农药后串联 RLC 电路内谐振频率的变化。在室温下，福美双浓度为 1 × 10 M 至 3.5 × 10 M 时，研究了传感器的性能。结果显示，每天约 0.031 % 的还原率具有出色的稳定性，灵敏度较高，最低检出率分别约为 82 % 和 0.25 × 10 M。这一优异结果的主要原因与泥浆形态多孔层中硅纳米晶的比表面积和密度密切相关，多孔层的泥浆形态约为6×10柱和孔/cm。所制作的阻抗匹配电路非常适合简单且低成本的传感过程，用于定量检测低于允许限度的福美双。