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Prognostics for Semiconductor Sustainability: Tool Failure Behavior Prediction in Fabrication Processes
IEEE Transactions on Systems, Man, and Cybernetics: Systems ( IF 8.7 ) Pub Date : 2024-03-06 , DOI: 10.1109/tsmc.2024.3359851 Li Zhu, Junghui Chen, Chun-I Chen
中文翻译:
半导体可持续性预测:制造过程中的工具故障行为预测
更新日期:2024-03-06
IEEE Transactions on Systems, Man, and Cybernetics: Systems ( IF 8.7 ) Pub Date : 2024-03-06 , DOI: 10.1109/tsmc.2024.3359851 Li Zhu, Junghui Chen, Chun-I Chen
中文翻译:
半导体可持续性预测:制造过程中的工具故障行为预测