Optomechanical crystals are a promising device platform for quantum transduction and sensing. Precise targeting of the optical and acoustic resonance frequencies of these devices is crucial for future advances on these fronts. However, fabrication disorder in these wavelength-scale nanoscale devices typically leads to inhomogeneous resonance frequencies. Here we achieve in situ, selective frequency tuning of optical and acoustic resonances in silicon optomechanical crystals via electric field-induced nano-oxidation using an atomic-force microscope. Our method can achieve a tuning range \; {\gt} {2}\;{\rm nm}$\; {\gt} {2}\;{\rm nm}$ (0.13%) for the optical resonance wavelength in the telecom C-band, and {\gt}{60}\;{\rm MHz}${\gt}{60}\;{\rm MHz}$ (1.2%) for the acoustic resonance frequency at 5 GHz. The tuning resolution of 1.1 pm for the optical wavelength and 150 kHz for the acoustic frequency allows us to spectrally align multiple optomechanical crystal resonators using a pattern generation algorithm. Our results establish a method for precise post-fabrication tuning of optomechanical crystals. This technique can enable coupled optomechanical resonator arrays, scalable resonant optomechanical circuits, and frequency matching of microwave-optical quantum transducers.

中文翻译：

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通过纳米氧化对光机械晶体进行原位调谐

光机械晶体是一种有前途的量子转导和传感设备平台。精确定位这些设备的光学和声学共振频率对于这些领域的未来进步至关重要。然而，这些波长级纳米级器件的制造混乱通常会导致谐振频率不均匀。在这里，我们使用原子力显微镜通过电场诱导的纳米氧化，实现了硅光机械晶体中光学和声学共振的原位选择性频率调谐。我们的方法可以实现一个调整范围； {\gt} {2}\;{\rm nm}$\; {\gt} {2}\;{\rm nm}$ (0.13%) 为电信 C 波段的光学谐振波长，{\gt}{60}\;{\rm MHz}${\gt}{60}\;{\rm MHz}$ (1.2%) 为5 GHz 的声共振频率。光波长的调谐分辨率为 1.1 pm，声频的调谐分辨率为 150 kHz，使我们能够使用图案生成算法对多个光机械晶体谐振器进行光谱对准。我们的结果建立了一种精确的光机械晶体制造后调谐的方法。该技术可以实现耦合光机谐振器阵列、可扩展谐振光机电路以及微波光量子换能器的频率匹配。