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Ultrahigh-Sensitivity Coupled Cantilever and Dual-cavity Piezoelectric Micromachined Ultrasonic Transducers
IEEE Electron Device Letters ( IF 4.9 ) Pub Date : 2024-03-14 , DOI: 10.1109/led.2024.3375956
Yi Gong 1 , Menglun Zhang 1 , Miaojie Liu 1 , Shaobo Gong 1 , Quanning Li 1 , Xuejiao Chen 1 , Wei Pang 1
Affiliation  



中文翻译:

超高灵敏度耦合悬臂和双腔压电微机械超声波换能器

更新日期:2024-03-14
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