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Characterization of ZnO Crystals of Various Geometries Grown by Mist Chemical Vapor Deposition on a c‐Plane Sapphire Substrate
Physica Status Solidi (B) - Basic Solid State Physics ( IF 1.6 ) Pub Date : 2024-03-17 , DOI: 10.1002/pssb.202300550
Kodai Kato 1 , Junichi Iwata 1 , Masaru Sakai 2 , Kazuhiko Hara 1 , Tetsuya Kouno 1
Affiliation  

ZnO nanowires, nanowalls, and thin‐film‐like crystals are grown simultaneously on a c‐plane sapphire substrate by mist chemical vapor deposition (mist‐CVD) at a high growth temperature. Mist‐CVD is expected to be a potentially low‐environment‐impact and low‐cost crystal growth technique. Using mist‐CVD techniques, a spatial distribution of crystal growth is obtained owing to equipment configurations that enable the simultaneous fabrication of ZnO crystals of various geometries. Their crystallinity and photoluminescence properties are examined to clarify their potential applications and to investigate low‐cost photonic applications based on these properties.

中文翻译:

ac 平面蓝宝石衬底上雾化学气相沉积生长的各种几何形状 ZnO 晶体的表征

在高生长温度下,通过雾化学气相沉积 (mist-CVD) 在 ac 平面蓝宝石衬底上同时生长 ZnO 纳米线、纳米墙和薄膜状晶体。雾气CVD有望成为一种潜在的低环境影响和低成本的晶体生长技术。使用雾气CVD技术,由于设备配置能够同时制造各种几何形状的ZnO晶体,因此获得了晶体生长的空间分布。检查它们的结晶度和光致发光特性,以阐明它们的潜在应用,并研究基于这些特性的低成本光子应用。
更新日期:2024-03-17
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