For a two-axis fast steering mirror (FSM) based on the flexible chain structure support and voice coil motor drive, the two axes are strongly coupled. This strong coupling may decrease the system positioning accuracy. In this study, the electric kinematics model associated with the voice coil motor and the motion and frequency equations associated with the flexible chain structure were analysed. A comprehensive system model was established considering shaft coupling, a digital controller with compensation coupling was designed, and the method of active compensation was used for decoupling. The experimental results showed that compared with the traditional non-decoupling control algorithm, the decoupling control method decreased the coupling degree from 7% to 0.8% and reduced the positioning accuracy error from 1.5% to 0.3%.

中文翻译：

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快速转向镜解耦建模设计及高精度位置控制

对于基于柔性链结构支撑和音圈电机驱动的两轴快速转向镜（FSM），两轴是强耦合的。这种强耦合可能会降低系统定位精度。在本研究中，分析了与音圈电机相关的电动运动学模型以及与柔性链条结构相关的运动和频率方程。建立了考虑轴耦合的综合系统模型，设计了带补偿耦合的数字控制器，并采用主动补偿的方法进行解耦。实验结果表明，与传统非解耦控制算法相比，解耦控制方法将耦合度从7%降低到0.8%，定位精度误差从1.5%降低到0.3%。