Anti-reflective structure can effectively suppress the light reflection on the surface of the object, thereby increasing the absorption of light, it has a wide range of applications in photovoltaics, such as optical sensors and photodetectors. Due to the limitation of low refractive index materials, it is difficult for existing anti-reflective coatings to achieve the expected low reflectance effect. Based on Maxwell’s electromagnetic wave theory, this paper uses Finite-Difference Time-Domain (FDTD)-solutions software to research the reflection spectrum of silicon-based pyramidal microstructure in the wavelength range of 200–1400$$nm, explores the influence of the height (H) and bottom side length (L) of the pyramidal on its reflection spectrum, and studies the changes of its electromagnetic field. On this basis, the absorption performance of the silicon-based pyramidal microstructure is further studied, and it is found that the absorption efficiency of silicon-based pyramidal microstructure for ultraviolet light reaches almost 100%, which provides important significance for its application in optical sensors and photodetectors.

抗反射结构可以有效抑制物体表面的光反射，从而增加对光的吸收，它在光伏领域有广泛的应用，例如光学传感器和光电探测器。由于低折射率材料的限制，现有的减反射涂层很难达到预期的低反射率效果。本文基于麦克斯韦电磁波理论，利用时域有限差分(FDTD)-solutions软件研究了硅基金字塔微结构在200~1400波长范围内的反射光谱。$$nm，探讨了金字塔的高度（H）和底边长度（L）对其反射光谱的影响，并研究了其电磁场的变化。在此基础上，进一步研究了硅基金字塔形微结构的吸收性能，发现硅基金字塔形微结构对紫外光的吸收效率几乎达到100%，这为其在光学传感器中的应用提供了重要意义和光电探测器。