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High figure-of-merit film bulk acoustic wave resonator based on Al0.87Sc0.13N film prepared using a novel dual-stage method
IEEE Electron Device Letters ( IF 4.9 ) Pub Date : 2024-03-25 , DOI: 10.1109/led.2024.3381172 Lishuai Zhao 1 , Peidong Ouyang 1 , Xinyan Yi 1 , Guoqiang Li 1
中文翻译：
采用新型双级方法制备的基于 Al0.87Sc0.13N 薄膜的高品质因数薄膜体声波谐振器
更新日期：2024-03-25
IEEE Electron Device Letters ( IF 4.9 ) Pub Date : 2024-03-25 , DOI: 10.1109/led.2024.3381172 Lishuai Zhao 1 , Peidong Ouyang 1 , Xinyan Yi 1 , Guoqiang Li 1
Affiliation
中文翻译：
采用新型双级方法制备的基于 Al0.87Sc0.13N 薄膜的高品质因数薄膜体声波谐振器
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