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Micro-Pirani Pressure Sensor with Operation Range beyond Atmospheric Pressure based on Aligned Carbon Nanotube Films
IEEE Electron Device Letters ( IF 4.9 ) Pub Date : 2024-03-25 , DOI: 10.1109/led.2024.3381153 Yuwei Wang 1 , Chenxi Liu 1 , Jun Qiu 1 , Yidan He 2 , Zhiwei Li 2 , Peng Liu 3 , Xianlong Wei 2
中文翻译：
基于对齐碳纳米管薄膜的微型皮拉尼压力传感器，工作范围超出大气压
更新日期：2024-03-25
IEEE Electron Device Letters ( IF 4.9 ) Pub Date : 2024-03-25 , DOI: 10.1109/led.2024.3381153 Yuwei Wang 1 , Chenxi Liu 1 , Jun Qiu 1 , Yidan He 2 , Zhiwei Li 2 , Peng Liu 3 , Xianlong Wei 2
Affiliation
中文翻译：
基于对齐碳纳米管薄膜的微型皮拉尼压力传感器，工作范围超出大气压
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