In order to realize high performance and miniaturized integrated voltage regulators (IVRs), the study of ON-chip passive components, especially coupled inductors is necessary. Silicon-embedded coupled three-dimensional solenoidal inductors with 10-turn and 15-turn interleaved windings are designed and batch fabricated in series using micro-electro-mechanical systems (MEMS) and a novel Zn-Al alloy micro-casting technique (MCT) process. The coupled inductors developed in this study incorporating an embedded $200~\mu \text{m}$ -thick ferrite magnetic core, exhibit superior inductance integration densities of 56.7 nH/mm2, and ultrahigh coupling coefficients over 0.96 at lower frequencies of around 10 MHz. Besides, the maximum efficiencies of both 10-turn and 15-turn coupled inductors reach 93.23% and 91%, respectively. These results demonstrate significant performance improvements over the corresponding air-core coupled inductors. In addition, both designs exhibit high current carrying capacity with a measured saturation current over 2.2 A when operating in an inversely coupled mode. The superior performance of proposed coupled inductors is beneficial to the design and application of IVRs.

中文翻译：

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带插入磁芯的高性能 3D 硅嵌入式耦合螺线管电感器

为了实现高性能、小型化的集成电压调节器(IVR)，有必要对片上无源元件，特别是耦合电感器进行研究。采用微机电系统 (MEMS) 和新型锌铝合金微铸造技术 (MCT) 设计并批量生产具有 10 匝和 15 匝交错绕组的硅嵌入耦合三维螺线管电感器过程。本研究中开发的耦合电感器结合了嵌入式 $200~\mu \text{m}$ -厚铁氧体磁芯，具有 56.7 nH/mm2 的卓越电感集成密度，以及在 10 MHz 左右的较低频率下超过 0.96 的超高耦合系数。此外，10匝和15匝耦合电感的最大效率分别达到93.23%和91%。这些结果表明，与相应的空芯耦合电感器相比，性能显着提高。此外，两种设计均表现出高载流能力，在反向耦合模式下工作时测得的饱和电流超过 2.2 A。所提出的耦合电感器的优越性能有利于 IVR 的设计和应用。