This paper introduces a unique multimode, multichannel piezoelectric vibration sensor for the next-generation fully implantable cochlear implant (FICI) systems. The sensor, which can be implanted on the middle ear chain to collect and filter the ambient sound in eight frequency bands, comprises an array of 4 M-shape multimode and 11 single cantilevers. Finite element (FE) analysis indicates a 2.05-fold improvement in capturing frequency information for the multimodal sensor compared to its single-mode counterpart. Under an acoustic excitation at 100 dB SPL, the sensor, mounted on an artificial tympanic membrane, yielded a peak output voltage of 546.16 mVpp and a peak sensitivity of 285.28 mVpp/Pa at 1613 Hz. The extrapolated acoustic results indicated a dynamic frequency range between 300 Hz and 6 kHz, even at 30 dB SPL. Furthermore, a lightweight titanium coupler, employing a two-sided clipping structure with a maximum wall thickness of 70 μm, is micromachined for surgical attachment of the transducer to the middle ear chain. A commercial accelerometer, implanted on the incus short process (SP) of a cadaver using the titanium coupler, successfully recorded 0.1 g for 100 dB SPL at 500 Hz, revealing the potential feasibility of the coupler for vibration sensor implantation. Moreover, the presented anatomically accurate FE model of the middle ear, exhibiting a high correlation coefficient (R) of 0.97 with the cadaveric experiment, suggests an efficient numerical approach for evaluating the implantation of middle ear prostheses. In this regard, the study holds great promise for clinical application in the field of implantable hearing aids.

中文翻译：

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基于 MEMS 技术的多通道多模式压电中耳植入概念，适用于下一代完全植入式耳蜗植入应用

本文介绍了一种独特的多模式、多通道压电振动传感器，用于下一代完全植入式人工耳蜗 (FICI) 系统。该传感器可植入中耳链，收集并过滤八个频段的环境声音，由 4 个 M 形多模和 11 个单悬臂梁阵列组成。有限元 (FE) 分析表明，与单模传感器相比，多模传感器捕获频率信息的能力提高了 2.05 倍。在 100 dB SPL 的声激励下，安装在人造鼓膜上的传感器在 1613 Hz 时产生 546.16 mVpp 的峰值输出电压和 285.28 mVpp/Pa 的峰值灵敏度。推断的声学结果表明动态频率范围在 300 Hz 到 6 kHz 之间，即使在 30 dB SPL 下也是如此。此外，轻质钛耦合器采用最大壁厚为 70 μm 的两侧夹持结构，经过微机械加工，可通过手术将换能器连接到中耳链。使用钛耦合器将商用加速度计植入尸体的砧骨短突 (SP) 上，成功记录 500 Hz 下 100 dB SPL 的 0.1 g，揭示了耦合器用于振动传感器植入的潜在可行性。此外，所提出的中耳解剖学精确有限元模型与尸体实验表现出 0.97 的高相关系数 (R)，为评估中耳假体的植入提供了一种有效的数值方法。从这一点来看，该研究在植入式助听器领域的临床应用具有广阔的前景。