This paper establishes a fully self‐consistent coupled model of fluid and external circuits. The Kirchhoff equation, the charge conservation equation, and Poisson equation are coupled via boundary conditions and integrated into the fluid model for iterative parameter solution. On the basis of this model, we investigate the influence of impedance matching on single‐frequency capacitively coupled plasma characteristics under different parameters and topological structures. The findings suggest that after several iterations the matching parameters converge. Using different initial circuit parameters, the adjustable capacitance and inductance are eventually adjusted to approximately equal values, resulting in the same optimal matching state, whereas diverse discharge parameters led to different outcomes. Under fixed parameters for two topologies, the power absorption efficiency increases, and the reflection coefficient approaches zero, and the best matching is found. This model can be extended to different fluid programs to investigate the impact of complex external circuits with impedance matching network on plasma discharge while simultaneously seeking best impedance matching.

中文翻译：

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电容耦合等离子体流体与外电路耦合模型的阻抗匹配设计

本文建立了流体和外部回路的完全自洽耦合模型。基尔霍夫方程、电荷守恒方程和泊松方程通过边界条件耦合并集成到流体模型中进行参数迭代求解。在此模型的基础上，我们研究了不同参数和拓扑结构下阻抗匹配对单频电容耦合等离子体特性的影响。研究结果表明，经过多次迭代后，匹配参数收敛。使用不同的初始电路参数，最终将可调电容和电感调整到近似相等的值，从而产生相同的最佳匹配状态，而不同的放电参数会导致不同的结果。两种拓扑在参数固定的情况下，功率吸收效率提高，反射系数接近于零，找到了最佳匹配。该模型可以扩展到不同的流体程序，以研究具有阻抗匹配网络的复杂外部电路对等离子体放电的影响，同时寻求最佳阻抗匹配。