Long-wave infrared (LWIR, 8–12 μm wavelengths) spectral spectra are of vital importance to thermal imaging. Conventional LWIR optics made from single-crystalline Ge and chalcogenide glasses are bulky and fragile. The challenge is exacerbated for wide-field-of-view (FOV) optics, which traditionally mandates multiple cascaded elements that severely add to complexity and cost. Here, we designed and experimentally realized a LWIR metalens platform based on bulk Si wafers featuring 140° FOV. The metalenses, which have diameters exceeding 4 cm, were fabricated using a scalable wafer-level process involving photolithography and deep reactive ion etching. Using a metalens-integrated focal plane array, we further demonstrated wide-angle thermal imaging.

中文翻译：

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宽视场、大面积长波红外硅超透镜

长波红外（LWIR，8–12 μm 波长）光谱对于热成像至关重要。由单晶锗和硫族化物玻璃制成的传统长波红外光学器件体积庞大且易碎。对于宽视场 (FOV) 光学器件来说，这一挑战更加严峻，传统上它需要多个级联元件，这严重增加了复杂性和成本。在这里，我们设计并实验实现了一个基于具有 140° FOV 的体硅晶圆的长波红外超透镜平台。超透镜的直径超过 4 厘米，采用可扩展的晶圆级工艺制造，涉及光刻和深反应离子蚀刻。使用超透镜集成焦平面阵列，我们进一步演示了广角热成像。