This paper reports a novel piezoelectric quartz crystal pressure sensor with a double-ended tuning fork (DETF) resonator. The key design is the resonator beams with a continuously variable section shape. Different from the traditional DETF with straight beams or the one with variable sections with steps, this design can improve sensitivity effectively. Theoretical analysis indicates that the sensitivity will increase with a decrease in beam width. Resonant pressure sensors with three different DETFs are designed and analyzed by finite element analysis software. Simulation results show that the sensitivity of this design is 162.27 Hz/MPa. This sensor has a typical structure, which includes three parts: the diaphragm, DETF resonator, and back-cavity structure. Quartz MEMS processes have been used in fabrication. The three parts are bonded together by vacuum glass frit sealing process. Test results of this sensor show that the natural frequency is 44.709 kHz with a quality factor of 12 717. The sensitivity is 155.6 Hz/MPa in the pressure range of 0–20 MPa. The results indicate that this novel design has advantages in sensitivity and fabrication processes. It will be a benefit for a high-performance and low-cost pressure measurement.

中文翻译：

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新型DETF连续可变截面全石英谐振压力传感器的设计与制作

本文报道了一种带有双端音叉（DETF）谐振器的新型压电石英晶体压力传感器。关键设计是具有连续可变截面形状的谐振器梁。与传统的直梁DETF或带有台阶的变截面DETF不同，这种设计可以有效提高灵敏度。理论分析表明，灵敏度随着波束宽度的减小而增加。采用有限元分析软件设计并分析了具有三种不同 DETF 的谐振压力传感器。仿真结果表明，本设计的灵敏度为162.27 Hz/MPa。该传感器具有典型的结构，包括膜片、DETF谐振器和后腔结构三部分。石英 MEMS 工艺已用于制造。这三个部件通过真空玻璃熔块密封工艺粘合在一起。该传感器测试结果表明，固有频率为44.709 kHz，品质因数为12 717，在0~20 MPa压力范围内灵敏度为155.6 Hz/MPa。结果表明，这种新颖的设计在灵敏度和制造工艺方面具有优势。这将有利于高性能和低成本的压力测量。