当前位置：
X-MOL 学术
›
J. Microelectromech. Syst.
›
论文详情
Our official English website, www.x-mol.net, welcomes your feedback! (Note: you will need to create a separate account there.)
Vacuum-Sealed MEMS Resonators Based on Silicon Migration Sealing and Hydrogen Diffusion
Journal of Microelectromechanical Systems ( IF 2.7 ) Pub Date : 2024-04-12 , DOI: 10.1109/jmems.2024.3382768 Tianjiao Gong 1 , Muhammad Jehanzeb Khan 1 , Yukio Suzuki 1 , Takashiro Tsukamoto 1 , Shuji Tanaka 1
中文翻译：
基于硅迁移密封和氢扩散的真空密封MEMS谐振器
更新日期：2024-04-12
Journal of Microelectromechanical Systems ( IF 2.7 ) Pub Date : 2024-04-12 , DOI: 10.1109/jmems.2024.3382768 Tianjiao Gong 1 , Muhammad Jehanzeb Khan 1 , Yukio Suzuki 1 , Takashiro Tsukamoto 1 , Shuji Tanaka 1
Affiliation
中文翻译：
基于硅迁移密封和氢扩散的真空密封MEMS谐振器
京公网安备 11010802027423号